Time: 14:00-16:00, Tuesday, November 14, 2023
Place: 1F Auditorium, Institute of Physics, Academia Sinica
Speaker: Academician Burn-Jeng Lin (College of Semiconductor Research, National Tsing Hua University)
Host: Dr. Chia-Seng Chang (Institute of Physics, Academia Sinica)
Website: https://www.phys.sinica.edu.tw/lecture_detail.php?id=2788&eng=T
Abstract:
EUV lithography is introduced in terms of light source, imaging, mask, resist, its potential, and challenges