{"id":32876,"date":"2023-11-02T00:19:11","date_gmt":"2023-11-01T16:19:11","guid":{"rendered":"https:\/newsletter.sinica.edu.tw\/?p=32876"},"modified":"2023-11-02T00:39:33","modified_gmt":"2023-11-01T16:39:33","slug":"%e6%b4%bb%e5%8b%95%e5%a0%b1%e5%90%8d%e3%80%89%e7%89%a9%e7%90%86%e6%89%80%e9%80%9a%e4%bf%97%e6%bc%94%e8%ac%9b%ef%bc%9aeuv-lithography","status":"publish","type":"post","link":"https:\/newsletter.sinica.edu.tw\/32876\/","title":{"rendered":"\u6d3b\u52d5\u5831\u540d\u3009\u7269\u7406\u6240\u901a\u4fd7\u6f14\u8b1b\uff1aEUV lithography"},"content":{"rendered":"<p>\u6642\u9593\uff1a 2023 \u5e74 11 \u6708 14 \u65e5\uff08\u661f\u671f\u4e8c\uff0914 \u6642\u81f3 16 \u6642<br \/>\n\u5730\u9ede\uff1a \u672c\u9662\u7269\u7406\u7814\u7a76\u6240 1 \u6a13\u6f14\u8b1b\u5ef3<br \/>\n\u4e3b\u8b1b\u4eba\uff1a \u6797\u672c\u5805\u9662\u58eb\uff08\u570b\u7acb\u6e05\u83ef\u5927\u5b78\u534a\u5c0e\u9ad4\u7814\u7a76\u5b78\u9662\uff09<br \/>\n\u4e3b\u6301\u4eba\uff1a \u5f35\u5609\u5347\u6240\u9577\uff08\u672c\u9662\u7269\u7406\u7814\u7a76\u6240\uff09<br \/>\n\u6d3b\u52d5\u7db2\u5740\uff1a <a href=\"https:\/www.phys.sinica.edu.tw\/lecture_detail.php?id=2788&#038;eng=T\" rel=\"noopener\" target=\"_blank\">https:\/www.phys.sinica.edu.tw\/lecture_detail.php?id=2788&#038;eng=T<\/a><br \/>\n\u806f\u7d61\u4eba\uff1a \u937e\u827e\u5ead\uff0c\uff0802\uff092789-8365\uff0c <a href=\"mailto:aiting@gate.sinica.edu.tw\" rel=\"noopener\" target=\"_blank\">aiting@gate.sinica.edu.tw<\/a><br \/>\n\u6458\u8981\uff1a<br \/>\nEUV lithography is introduced in terms of light source, imaging, mask, resist, its potential, and challenges.<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/newsletter.sinica.edu.tw\/wp-content\/uploads\/2023\/10\/2-3-1-724x1024.jpg\" alt=\"\u6d3b\u52d5\u5831\u540d\u3009\u7269\u7406\u6240\u901a\u4fd7\u6f14\u8b1b\uff1aEUV lithography\" width=\"724\" height=\"1024\" class=\"aligncenter size-large wp-image-32877\" srcset=\"https:\/newsletter.sinica.edu.tw\/wp-content\/uploads\/2023\/10\/2-3-1-724x1024.jpg 724w, https:\/newsletter.sinica.edu.tw\/wp-content\/uploads\/2023\/10\/2-3-1-212x300.jpg 212w, https:\/newsletter.sinica.edu.tw\/wp-content\/uploads\/2023\/10\/2-3-1-768x1086.jpg 768w, https:\/newsletter.sinica.edu.tw\/wp-content\/uploads\/2023\/10\/2-3-1-1086x1536.jpg 1086w, https:\/newsletter.sinica.edu.tw\/wp-content\/uploads\/2023\/10\/2-3-1-1080x1528.jpg 1080w, https:\/newsletter.sinica.edu.tw\/wp-content\/uploads\/2023\/10\/2-3-1.jpg 1240w\" sizes=\"(max-width: 724px) 100vw, 724px\" \/><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u6642\u9593\uff1a 2023 \u5e74 11 \u6708 14 \u65e5\uff08\u661f\u671f\u4e8c\uff0914 \u6642\u81f3 16 \u6642 \u5730\u9ede\uff1a \u672c\u9662\u7269\u7406\u7814\u7a76\u6240 1 \u6a13\u6f14\u8b1b\u5ef3  [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":32878,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[5],"tags":[],"acf":[],"_links":{"self":[{"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/posts\/32876"}],"collection":[{"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/comments?post=32876"}],"version-history":[{"count":1,"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/posts\/32876\/revisions"}],"predecessor-version":[{"id":32970,"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/posts\/32876\/revisions\/32970"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/media\/32878"}],"wp:attachment":[{"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/media?parent=32876"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/categories?post=32876"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/newsletter.sinica.edu.tw\/wp-json\/wp\/v2\/tags?post=32876"}],"curies":[{"name":"wp","href":"https:\/api.w.org\/{rel}","templated":true}]}}